Basic Theories of Semiconductor Electrochemistry.- Silicon/Electrolyte Interface.- Anodic Oxide.- Etching of Oxides.- Anodic Behavior.- Cathodic Behavior and Redox Couples.- Etching of Silicon.- Porous Silicon.- Summary and Closing Remarks.

Reviews

`Dr. Zhang provides an encyclopedic compilation of the literature on the many electrochemical effects that impact the processing of silicon and its native oxide. This book will be an important reference for the silicon specialist and may have within its pages that key detail which will explain process anomalies to the MEMS practitioner.'
Steve Senturia, Weller Professor of Electrical Engineering, Massachusetts Institute of Technology
`This book is a must for every laboratory where semiconductor electrochemsitry is actively pursued. It is a welcome and recommended addition to every library of an institution where electrochemistry is a suibject of active research.'
Journal of Solid State Electrochemistry, 7:5

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