Atom Probe Tomography
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Table of Contents

1 Overview and Historical Evolution.- 1.1 General Introduction.- 1.2 Evolution of the Three-dimensional Atom Probe.- 2 The Art of Specimen Preparation.- 2.1 Initial Preparation Methods.- 2.2 Thin Films.- 2.3 Electropolishing.- 2.4 Milling.- 2.5 Other Methods.- 2.6 Cleaning and Inspection.- 2.7 Prescreening in Transmission Electron Microscope.- 3 Field Ion Microscopy.- 3.1 Imaging Procedure.- 3.2 Field Ion Micrographs.- 3.3 Estimation of Parameters from Field Ion Images.- 3.4 Theoretical Background of Field Ion Microscopy.- 4 Instrumentation.- 4.1 Vacuum System.- 4.2 Field Ion Microscope.- 4.3 Mass Spectrometer.- 4.4 Instruments.- 5 Experimental Factors.- 5.1 Atom Probe Analysis Procedure.- 5.2 Volume of Analysis and Geometrical Considerations.- 5.3 Preferential Retention and Evaporation.- 5.4 Interpretation and Assignment of Ions.- 5.5 Reconstruction of Atom Positions.- 5.6 Detection Efficiency.- 5.7 Specimen Rupture or Failure.- 6 Data Representations and Analysis.- 6.1 Visualization and Analysis Methods for Individual Atoms.- 6.2. Smoothing Data.- 6.3 Data Representations.- 6.4 Composition Determinations.- 6.5 Estimation of Dimensions.- 6.6 Clustering and Ordering.- 6.7 Topological and Fractal Methods.- A. Reviews.- B. Phase Transformations.- C. Steels.- D. Superalloys.- E. Intermetallics.- F. Aluminum Alloys.- G. Multilayers and Films.- H. Miscellaneous Studies.- I. Other Sources of Reference to Atom Probe Studies.- Appendices.- A Formulae.- B Useful Constants and Conversions.- C Predictions of the Low Temperature Evaporation Field and Charge States for the Elements.- D Stereographic Projections.- E Percentage Points of the X2 Distribution.- F Periodic Table of Material Parameters.- G Periodic Table of Isotope Abundances.- Atom Probe Tomography.- Analysis at the Atomic Level.

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