Scanning Electron Microscopy and X-Ray Microanalysis
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Table of Contents

Preface.- Scanning Electron Microscopy and Associated Techniques: Overview.- Electron Beam – Specimen Interactions: Interaction Volume.- Backscattered Electrons.- Secondary Electrons.- X-rays.- SEM Instrumentation.- Image Formation.- SEM Image Interpretation.- The Visibility of Features in SEM Images.- Image Defects.- High resolution imaging.- Low Beam Energy SEM.- Variable Pressure Scanning Electron Microscopy (VPSEM).- ImageJ and Fiji.- SEM Imaging checklist.- SEM Case Studies.- Energy Dispersive X-ray Spectrometry: Physical Principles and User-Selected Parameters.- DTSA-II EDS Software.- Qualitative Elemental Analysis by Energy Dispersive X-ray Spectrometry.- Quantitative Analysis: from k-ratio to Composition.- Quantitative analysis: the SEM/EDS elemental microanalysis k-ratio procedure for bulk specimens, step-by-step.- Trace Analysis by SEM/EDS.- Low Beam Energy X-ray Microanalysis.- Analysis of Specimens with Special Geometry: Irregular Bulk Objects and Particles.- CompositionalMapping.- Attempting Electron-Excited X-ray Microanalysis in the Variable Pressure Scanning Electron Microscope (VP-SEM).- Energy Dispersive X-ray Microanalysis Checklist.- X-ray Microanalysis Case Studies.- Cathodoluminescence.- Characterizing crystalline materials in the SEM.- Focused Ion Beam Applications in the SEM laboratory.- Ion Beam Microscopy.- Appendix – A Database of Electron-Solid Interactions.- Index.

About the Author

This text is written by a team of authors associated with SEM and X-ray Microanalysis Courses presented as part of the Lehigh University Microscopy Summer School. Several of the authors have participated in this activity for more than 30 years.

Reviews

Form the reviews of the third edition:“There is no other single volume that covers as much theory and practice of SEM or X-ray microanalysis as Scanning Electron Microscopy and X-ray Microanalysis, 3rd Edition does. It is clearly written ... well organized. ... This is a reference text that no SEM or EPMA laboratory should be without.” (Thomas J. Wilson, Scanning, Vol. 27 (4), July/August, 2005)“As the authors pointed out, the number of equations in the book is kept to a minimum, and important conceptions are also explained in a qualitative manner. A lot of very distinct images and schematic drawings make for a very interesting book and help readers who study scanning electron microscopy and X-ray microanalysis. The principal application and sample preparation given in this book are suitable for undergraduate students and technicians learning SEEM and EDS/WDS analyses. It is an excellent textbook for graduate students, and an outstanding reference for engineers, physical, and biological scientists.” (Microscopy and Microanalysis, Vol. 9 (5), October, 2003)

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