Fishpond Gift Vouchers - Let them choose!

We won't be beaten by anyone. Guaranteed

Introduction to Microfabrication
By

Rating

Product Description
Product Details

Table of Contents

Preface to the First Edition. Preface to the Second Edition. Acknowledgements. 1 Introduction. Characterization. 3 Simulation of Microfabrication Processes. 4 Silicon. 5 Thin-Film Materials and Processes. 6 Epitaxy. 7 Advanced Thin Films. 8 Pattern Generation. 9 Optical Lithography. 10 Advanced Lithography. 11 Etching. 12 Wafer Cleaning and Surface Preparation. 13 Thermal Oxidation. 14 Diffusion. 15 Ion Implantation. 16 CMP: Chemical?Mechanical Polishing. 17 Bonding. 18 Polymer Microprocessing. 19 Glass Microprocessing. 20 Anisotropic Wet Etching. 21 Deep Reactive Ion Etching. 22 Wafer Engineering. 23 Special Processes and Materials. 24 Serial Microprocessing. 25 Process Integration. 26 MOS Transistor Fabrication. 27 Bipolar Transistors. 28 Multilevel Metallization. 29 Surface Micromachining. 30 MEMS Process Integration. 31 Process Equipment. 32 Equipment for Hot Processes. 33 Vacuum and Plasmas. 34 CVD and Epitaxy Equipment. 35 Cleanrooms. 36 Yield and Reliability. 37 Economics of Microfabrication. 38 Moore's Law and Scaling Trends. 39 Microfabrication at Large. Appendix A Properties of Silicon. Appendix B Constants and Conversion Factors. Appendix C Oxide and Nitride Thickness by Color. Index.

About the Author

Professor Sami Franssila, Helsinki University of Technology,Finland Sami Franssila has taught courses on microfluidics, bioMEMs,microsystems, nanoscience, silicon microtechnology and thin-filmtechnology at Helsinki University of Technology since 1998. He isgroup leader of the Microfabrication group at Micronova, the Centrefor Micro and Nanotechnology which is run jointly by the VTTTechnical Research Centre of Finland and Helsinki University ofTechnology. Professor Franssila researches into micro- and nanofabrication forfluidic, chemical and biological devices, chemical microsystems andthin film technology. He has authored or co-authored over 60 peer reviewed articles, 120international conference papers and written one textbook Introduction to Microfabrication, published by John Wiley& Sons in 2004.

Ask a Question About this Product More...
Write your question below:
Look for similar items by category
How Fishpond Works
Fishpond works with suppliers all over the world to bring you a huge selection of products, really great prices, and delivery included on over 25 million products that we sell. We do our best every day to make Fishpond an awesome place for customers to shop and get what they want — all at the best prices online.
Webmasters, Bloggers & Website Owners
You can earn a 5% commission by selling Introduction to Microfabrication on your website. It's easy to get started - we will give you example code. After you're set-up, your website can earn you money while you work, play or even sleep! You should start right now!
Authors / Publishers
Are you the Author or Publisher of a book? Or the manufacturer of one of the millions of products that we sell. You can improve sales and grow your revenue by submitting additional information on this title. The better the information we have about a product, the more we will sell!
Item ships from and is sold by Fishpond World Ltd.
Back to top